爱发科UTM系列分子泵维修

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地址：上海市松江区申港路3255号金地威新智造园3幢202

邮箱：joyo_tmp@126.com

产品详情

Wide range and high throughput models	High back-pressure and high compression models	Inlet flange size	N₂ pumping speed (L/s) 1 2
-	UTM-6300FH	VG500	6300
UTM-3301FW	UTM-3303FH	VG350	3300
UTM-2300FW	-	VG300	2730
		VG250	2230
		ICF305	2110
UTM-1400FW	-	VG250	1490
		VG200	1360
		ICF253	1300
UTM-1001FW	UTM-1001FH	VG200	1000
UTM-1001FW	UTM-1001FH	ICF253	1000
UTM-800FW	UTM-800FH	VG150	810
UTM-800FW	UTM-800FH	ICF203	740
UTM-480FW	UTM-480FH	VG150	480
UTM-480FW	UTM-480FH	ICF203	480
UTM-350FW	UTM-350FH	VG100	350
UTM-350FW	UTM-350FH	ICF152	330

*1Value measured in accordance with JVIS005 standard, or calculated value based on it

*2Protective mesh isn't used.

odel		UTM -50	UTM -150	UTM -300	UTM -500
Inlet flange size		CF114	CF152		CF203
		VG65	VG100		VG150
Outlet flange size		NW16	NW25		NW40
Pumping speed 1 2	N₂	50L/s	190L/s	300L/s	550L/s
	H₂	40L/s	160L/s	260L/s	500L/s
Ultimate pressure 1 3		10^-7Pa	10^-8Pa
Maximum compression ratio 1 3	N₂	>10⁸
	H₂	10³	10⁴		10⁵
Bearing type	Top	Magnet bearings
	Bottom	Pivot bearings
Cooling method		Water-cooled/air-cooled

*1Value measured in accordance with JVIS005 standard, or calculated value based on it

*2Evacuation speed values are values when protective mesh isn't used.

*3Values given are orders of magnitude.